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[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing
Chouichi, Aabir, Blue, Jakey, Yugma, Claude, Pasqualini, FrancoisYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373159
File:
PDF, 976 KB
english, 2018