[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Enhancing flexibility and robustness of semiconductor production by using autonomous modular services
Keil, Sophia, Schneider, Germar, Kuttig, Mathias, Deutschlander, Arthur, Lange, Arnold, Heinrich, HaraldYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373171
File:
PDF, 1.11 MB
english, 2018