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[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Characterization of sub-10 nm filter cleanliness by electrophoretic purification and analysis
Payne, Makonnen M., Varanasi, Rao, Wildermuth, Glen W., Ackermann, Arthur J.Year:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373186
File:
PDF, 717 KB
english, 2018