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[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Computational fluid dynamics modelling for refining component design: AEM: Advanced equipment and material processes
Geiger, Jack, Aliev, Ruslan, Base, Howard, Rozga, Joel, Ibraham, MounirYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373200
File:
PDF, 1.44 MB
english, 2018