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[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - The long journey from standardisation to full automation of a mature 200 mm fab
Heinrich, Harald, Deutschlander, ArthurYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373214
File:
PDF, 687 KB
english, 2018