[IEEE 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Austin, TX (2018.3.19-2018.3.22)] 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Test structures for debugging variation of critical devices caused by layout-dependent effects in FinFETs
Lin, Qi, Pan, Hans, Chang, JonathanYear:
2018
Language:
english
DOI:
10.1109/ICMTS.2018.8383751
File:
PDF, 682 KB
english, 2018