[IEEE 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Austin, TX (2018.3.19-2018.3.22)] 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Validation of the BSIM4 irregular LOD SPICE model by characterization of various irregular LOD test structures
Peddenpohl, Bob, Otrokov, Max, Wells, JeremyYear:
2018
Language:
english
DOI:
10.1109/ICMTS.2018.8383758
File:
PDF, 522 KB
english, 2018