[IEEE 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Austin, TX (2018.3.19-2018.3.22)] 2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) - A test structure to reveal short-range correlation effects of mismatch fluctuations in backend metal fringe capacitors
Tuinhout, Hans, Duijnhoven, Adrie Zegers-van, Brunets, IhorYear:
2018
Language:
english
DOI:
10.1109/ICMTS.2018.8383771
File:
PDF, 2.06 MB
english, 2018