Properties of ITO films deposited with different...

Metals and Materials International 2007 / 12 Vol. 13; Iss. 6

Properties of ITO films deposited with different conductivity ITO targets

Joon Hong Park, Sang Chul Lee, Pung Keun Song
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Volume:
13
Language:
english
Pages:
4
DOI:
10.1007/bf03027905
Date:
December, 2007
File:
PDF, 260 KB
english, 2007
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