RPECVD thin silicon carbonitride films using...

Journal de Physique IV (Proceedings) /Le Journal de Physique IV 1999 / 09 Vol. 9; Iss. PR8

RPECVD thin silicon carbonitride films using hexamethyldisilazane

Fainer, N. I., Kosinova, M. L., Rumyantsev, Yu. M., Kuznetsov, F. A.
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Volume:
9
Language:
english
Journal:
Le Journal de Physique IV
DOI:
10.1051/jp4:1999897
Date:
September, 1999
File:
PDF, 312 KB
english, 1999
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