A Novel Scanning Force Microscopy Probe with Thermal-Electrical Actuation and Piezo-Resistive Sensing
Liu, XiaoChen, Wang, Lihao, Zhu, Yinfang, Zhao, Junyuan, Zhang, jinying, Yang, Jinling, Yang, FuhuaLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aad927
Date:
August, 2018
File:
PDF, 1010 KB
english, 2018