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Initiatives of Precision Engineering at the Beginning of a Millennium || Development of a new measurement system for straightness error by a heterodyne interferometer with a grating
Inasaki, IchiroVolume:
10.1007/b1
Year:
2002
Language:
english
DOI:
10.1007/0-306-47000-4_157
File:
PDF, 313 KB
english, 2002