Effects of Ar ion assisted deposition on the optical and...

Optoelectronics Letters 2006 / 09 Vol. 2; Iss. 5

Effects of Ar ion assisted deposition on the optical and electrical characteristics of electron-beam-evaporated amorphous Si films

Xiong-wen Shu, Chen Xu, Zeng-xia Tian, Dan Luo, Guang-di Shen
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Volume:
2
Language:
english
Pages:
3
DOI:
10.1007/bf03033523
Date:
September, 2006
File:
PDF, 275 KB
english, 2006
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