Self-Assembly of an Ultrahigh-χ Block Copolymer with...

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Macromolecules 2018 / 08

Self-Assembly of an Ultrahigh-χ Block Copolymer with Versatile Etch Selectivity

Azuma, Koei, Sun, Jian, Choo, Youngwoo, Rokhlenko, Yekaterina, Dwyer, Jonathan H., Schweitzer, Beau, Hayakawa, Teruaki, Osuji, Chinedum O., Gopalan, Padma
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Language:
english
Journal:
Macromolecules
DOI:
10.1021/acs.macromol.8b01409
Date:
August, 2018
File:
PDF, 2.33 MB
english, 2018
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