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An On-Chip SiC MEMS Device with Integrated Heating, Sensing, and Microfluidic Cooling Systems
Dinh, Toan, Phan, Hoang-Phuong, Kashaninejad, Navid, Nguyen, Tuan-Khoa, Dao, Dzung Viet, Nguyen, Nam-TrungLanguage:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201800764
Date:
August, 2018
File:
PDF, 1.71 MB
english, 2018