Structural Properties of Al–O Monolayers in SiO...

ACS Applied Materials & Interfaces 2018 / 08

Structural Properties of Al–O Monolayers in SiO 2 on Silicon and the Maximization of their Negative Fixed Charge Density

Hiller, Daniel, Göttlicher, Jörg, Steininger, Ralph, Huthwelker, Thomas, Julin, Jaakko, Munnik, Frans, Wahl, Michael, Bock, Wolfgang, Schoenaers, Ben, Stesmans, Andre, Koenig, Dirk
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.8b06098
Date:
August, 2018
File:
PDF, 1.24 MB
english, 2018
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