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Molecular dynamics simulation of aluminum nitride deposition: temperature and N : Al ratio effects
Zhang, Libin, Yan, Han, Zhu, Guo, Liu, Sheng, Gan, ZhiyinVolume:
5
Language:
english
Journal:
Royal Society Open Science
DOI:
10.1098/rsos.180629
Date:
August, 2018
File:
PDF, 2.60 MB
english, 2018