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Geometry Measurement of Submerged Metallic Micro-Parts Using Confocal Fluorescence Microscopy
Mikulewitsch, Merlin, Auerswald, Matthias Marcus, von Freyberg, Axel, Fischer, AndreasVolume:
1
Language:
english
Journal:
Nanomanufacturing and Metrology
DOI:
10.1007/s41871-018-0019-6
Date:
September, 2018
File:
PDF, 1.30 MB
english, 2018