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Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition
Peng, Hong, Feng, Xingcan, Gong, Jinhui, Wang, Wei, Liu, Hu, Quan, Zhijue, Pan, Shuan, Wang, LiVolume:
459
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.08.093
Date:
November, 2018
File:
PDF, 2.07 MB
english, 2018