Indiffusion of oxygen in germanium induced by pulsed laser...

Materials Science in Semiconductor Processing 2018 / 12 Vol. 88

Indiffusion of oxygen in germanium induced by pulsed laser melting

Milazzo, R., Linser, M., Scarpa, D., Carnera, A., Andrighetto, A., Napolitani, E.
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Volume:
88
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.07.036
Date:
December, 2018
File:
PDF, 628 KB
english, 2018
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