Experience in the Development of a Configurable Laboratory...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2018 / 7 Vol. 12; Iss. 4

Experience in the Development of a Configurable Laboratory UV Projection Photolithography System of Micron Resolution

Prokopovich, P. A., Frolov, D. N., Frolov, V. N., Klement’ev, E. S., Grunin, A. I., Dikaya, O. A., Koneva, U. Yu., Lyahov, G. G., Efimov, D. D., Serebrennikov, D. A., Molchanov, V. V., Severin, E. A.,
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Volume:
12
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451018040341
Date:
July, 2018
File:
PDF, 1.53 MB
english, 2018
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