Ductile Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors.
Suzuki, Hiroshi, Hirano, Minoru, Abe, Moritoshi, Niino, Yasuo, Namba, YoshiharuVolume:
61
Year:
1995
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.61.571
File:
PDF, 8.73 MB
1995