A theoretical study of the VOC sensor based on...

Measurement 2018 / 12 Vol. 129

A theoretical study of the VOC sensor based on polymer-coated diaphragm embedded with FBAR

Guo, Huihui, Gao, Yang, Liu, Tingting
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Volume:
129
Language:
english
Journal:
Measurement
DOI:
10.1016/j.measurement.2018.07.021
Date:
December, 2018
File:
PDF, 834 KB
english, 2018
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