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Incubation effect during laser-induced backside wet etching of sapphire using high-repetition-rate near-infrared nanosecond lasers
Long, Jiangyou, Zhou, Caixia, Cao, Zhouquan, Xie, Xiaozhu, Hu, WeiVolume:
109
Language:
english
Journal:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2018.07.066
Date:
January, 2019
File:
PDF, 3.25 MB
english, 2019