Chip Morphology of Ultra-Precision Diamond Turning of Single Crystal Slicon.
YAN, Jiwang, SYOJI, Katsuo, KURIYAGAWA, TsunemotoVolume:
65
Year:
1999
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.65.1008
File:
PDF, 6.61 MB
1999