Chip Morphology of Ultra-Precision Diamond Turning of...

Chip Morphology of Ultra-Precision Diamond Turning of Single Crystal Slicon.

YAN, Jiwang, SYOJI, Katsuo, KURIYAGAWA, Tsunemoto
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Volume:
65
Year:
1999
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.65.1008
File:
PDF, 6.61 MB
1999
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