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Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment
Sasai, Kensuke, Keyamura, Kazuki, Suzuki, Haruka, Toyoda, HirotakaVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.066201
Date:
June, 2018
File:
PDF, 2.09 MB
english, 2018