Modeling and validation of uniform large-area optical...

Applied Optics 2017 / 02 Vol. 56; Iss. 4

Modeling and validation of uniform large-area optical coating deposition on a rotating drum using microwave plasma reactive sputtering

Li, Cheng, Song, Shigeng, Gibson, Des, Child, David, Chu, Hin on, Waddell, Ewan
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Volume:
56
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.56.000c65
Date:
February, 2017
File:
PDF, 1.01 MB
english, 2017
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