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[OSA CLEO: Applications and Technology - San Jose, California (2014..-..)] CLEO: 2014 - Monolithic Three Dimensional Dielectrophoretic Actuator for Positioning Optics Fabricated by Femtosecond Laser
Yang, Tao, Bellouard, YvesYear:
2014
Language:
english
DOI:
10.1364/cleo_at.2014.aw1h.5
File:
PDF, 142 KB
english, 2014