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Influence of substrate annealing on inducing Ti3+ and oxygen vacancy in TiO2 thin films deposited via RF magnetron sputtering
Abdullah, S.A., Sahdan, M.Z., Nafarizal, N., Saim, H., Embong, Z., Cik Rohaida, C.H., Adriyanto, F.Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.08.137
Date:
August, 2018
File:
PDF, 1.81 MB
english, 2018