A novel approach based on simulation of tunable MEMS...

Optics Communications 2019 / 01 Vol. 430

A novel approach based on simulation of tunable MEMS diaphragm for extrinsic Fabry–Perot sensors

Hayber, Sekip Esat, Tabaru, Timucin Emre, Saracoglu, Omer Galip
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Volume:
430
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2018.08.021
Date:
January, 2019
File:
PDF, 2.92 MB
english, 2019
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