Improvement of Barrier CMP Performance with Alkaline...

ECS Journal of Solid State Science and Technology 2018 Vol. 7; Iss. 9

Improvement of Barrier CMP Performance with Alkaline Slurry: Role of Ionic Strength

Wang, Jianchao, Niu, Xinhuan, Liu, Yuling, Wang, Chenwei, Yang, Shenghua, Zhang, Kai, Xu, Yi, Ma, Tengda, Zhang, Wenqian
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Volume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0111809jss
File:
PDF, 907 KB
english, 2018
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