A Study of High-Low Frequency Charge Pumping Method on Evaluating Interface Traps in Bulk FinFETs
Tian, Yangyu, Chen, Kun, Jin, Ying, Luo, JunVolume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0121809jss
File:
PDF, 817 KB
english, 2018