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Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C:H Films Prepared through Magnetron Sputtering Deposition
Liu, Xiaoqiang, Hao, Junying, Yang, Hu, Lin, Xiuzhou, Zeng, XianguangVolume:
2015
Year:
2015
Language:
english
Journal:
Journal of Nanomaterials
DOI:
10.1155/2015/194308
File:
PDF, 4.57 MB
english, 2015