Role of dielectric layer and beam membrane in improving the performance of capacitive RF MEMS switches for Ka-band applications
Sravani, K. Girija, Narayana, T. Lakshmi, Guha, Koushik, Rao, K. SrinivasaLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4038-4
Date:
August, 2018
File:
PDF, 1.83 MB
english, 2018