Dynamics of reactions inhibiting epitaxial growth of...

Computational Materials Science 2018 / 12 Vol. 155

Dynamics of reactions inhibiting epitaxial growth of Si(100) surfaces via interaction with hydrogen chloride

Kunioshi, Nilson, Fujimura, Yoshiki, Fuwa, Akio, Yamaguchi, Katsunori
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Volume:
155
Language:
english
Journal:
Computational Materials Science
DOI:
10.1016/j.commatsci.2018.08.037
Date:
December, 2018
File:
PDF, 1.99 MB
english, 2018
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