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High quality factor silicon oxynitride optical waveguide ring resonators
Jia, Yue, Dai, Xiaoyu, Xiang, Yuanjiang, Fan, DianyuanVolume:
85
Language:
english
Journal:
Optical Materials
DOI:
10.1016/j.optmat.2018.08.031
Date:
November, 2018
File:
PDF, 1.21 MB
english, 2018