Characterization of TiCN thin films deposited by Dc-Pulsed...

Materials Research 2014 / 12 Vol. 17; Iss. 6

Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor

Shafiei, Seyed Mohammad Mahdi, Divandari, Mehdi, Boutorabi, Seyed Mohammad Ali, Naghizadeh, Rahim
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Volume:
17
Language:
english
Journal:
Materials Research
DOI:
10.1590/1516-1439.309514
Date:
December, 2014
File:
PDF, 4.39 MB
english, 2014
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