Numerical simulation of an RF inductively coupled plasma...

The European Physical Journal Applied Physics 2002 / 05 Vol. 18; Iss. 2

Numerical simulation of an RF inductively coupled plasma for functional enhancement by seeding vaporized alkali metal

Nishiyama, H., Shigeta, M.
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Volume:
18
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2002034
Date:
May, 2002
File:
PDF, 313 KB
english, 2002
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