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Characterization of semiconductor devices by infrared laser interferometry
N. Seliger, E. Gornik, C. Fürböck, D. Pogany, P. Habaš, R. Thalhammer, M. StoisiekVolume:
115
Language:
english
Pages:
8
DOI:
10.1007/bf03159611
Date:
July, 1998
File:
PDF, 892 KB
english, 1998