A novel method for quantitative height measurement based on an astigmatic optical profilometer
Liao, Hsien-Shun, Huang, Guan-Teng, Tu, Ho-Da, Lin, Ting-He, Hwu, En-TeLanguage:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aadc49
Date:
August, 2018
File:
PDF, 771 KB
english, 2018