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Systematic DC/AC Performance Benchmarking of Sub-7-nm Node FinFETs and Nanosheet FETs
Yoon, Jun-Sik, Jeong, Jinsu, Lee, Seunghwan, Baek, Rock-HyunVolume:
6
Year:
2018
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2018.2866026
File:
PDF, 1.29 MB
english, 2018