Nanoporous Ge thin film production combining Ge sputtering and dopant implantation
Toinin, Jacques Perrin, Portavoce, Alain, Hoummada, Khalid, Texier, Michaël, Bertoglio, Maxime, Bernardini, Sandrine, Abbarchi, Marco, Chow, LeeVolume:
6
Language:
english
Journal:
Beilstein Journal of Nanotechnology
DOI:
10.3762/bjnano.6.32
Date:
January, 2015
File:
PDF, 2.16 MB
english, 2015