Studies of the electronic excitation modifications induced...

Materials Science in Semiconductor Processing 2018 / 12 Vol. 88

Studies of the electronic excitation modifications induced by SHI of Au ions in RF sputtered ZrO2 thin films

Chauhan, Vishnu, Gupta, T., Koratkar, N., Kumar, Rajesh
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Volume:
88
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.08.021
Date:
December, 2018
File:
PDF, 3.14 MB
english, 2018
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