[AIP ION IMPLANTATION TECHNOLOGY: 17th International...

  • Main
  • [AIP ION IMPLANTATION TECHNOLOGY: 17th...

[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Improvement of Contact Resistance with Molecular Ion Implantation

Lee, Kyung Won, Lee, Jin Ku, Oh, Jae Geun, Huh, Tae Hoon, Ju, Min Ae, Jeon, Seung Joon, Ku, Ja Chun, Park, Sung Ki, Kim, Steve, Yoon, Dae Ho, Ra, Geum Joo, Harris, Mark A., Reece, Ronald N., Seebauer,
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2008
Language:
english
DOI:
10.1063/1.3033673
File:
PDF, 3.97 MB
english, 2008
Conversion to is in progress
Conversion to is failed