[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Improvement of Contact Resistance with Molecular Ion Implantation
Lee, Kyung Won, Lee, Jin Ku, Oh, Jae Geun, Huh, Tae Hoon, Ju, Min Ae, Jeon, Seung Joon, Ku, Ja Chun, Park, Sung Ki, Kim, Steve, Yoon, Dae Ho, Ra, Geum Joo, Harris, Mark A., Reece, Ronald N., Seebauer,Year:
2008
Language:
english
DOI:
10.1063/1.3033673
File:
PDF, 3.97 MB
english, 2008