Silicon nitride-capped silicon nanocrystals via a...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 09 Vol. 36; Iss. 5

Silicon nitride-capped silicon nanocrystals via a nonthermal dual-plasma synthesis approach

Mandal, Rajib, O’Shea, Kyle, Anthony, Rebecca
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5039352
Date:
September, 2018
File:
PDF, 1.43 MB
english, 2018
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