Low atomic number silicon nitride films for transmission electron microscopy
Fu, Jianyu, Xiong, Wenjuan, Shang, Haiping, Liu, Ruiwen, Li, Junfeng, Wang, Weibing, Wang, Wenwu, Chen, DapengVolume:
89
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.08.024
Date:
January, 2019
File:
PDF, 1.48 MB
english, 2019