Modeling of creation silicon ion clusters in a silane plasma
A. F. Stekolnikov, D. V. Feschenko, P. G. Makshov, A. G. GalkevichVolume:
54
Language:
english
Pages:
1
DOI:
10.1007/bf03166463
Date:
March, 2004
File:
PDF, 341 KB
english, 2004