Investigation of plasma parameters in the DC planar magnetron in balanced and unbalanced mode
V. Straňák, M. Tichý, H. Steffen, S. Wrehde, R. HipplerVolume:
54
Language:
english
Pages:
1
DOI:
10.1007/bf03166493
Date:
March, 2004
File:
PDF, 519 KB
english, 2004