Investigation of plasma parameters in the DC planar...

Investigation of plasma parameters in the DC planar magnetron in balanced and unbalanced mode

V. Straňák, M. Tichý, H. Steffen, S. Wrehde, R. Hippler
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Volume:
54
Language:
english
Pages:
1
DOI:
10.1007/bf03166493
Date:
March, 2004
File:
PDF, 519 KB
english, 2004
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