RBS study of amorphous silicon carbide films deposited by PECVD
J. Huran, I. Hotovy, A. P. Kobzev, N. I. BalalykinVolume:
54
Language:
english
Pages:
1
DOI:
10.1007/bf03166522
Date:
March, 2004
File:
PDF, 570 KB
english, 2004