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Herpin effective media resonant underlayers and resonant overlayer designs for ultra-high NA interference lithography
Bourke, Levi, Blaikie, Richard J.Volume:
34
Language:
english
Journal:
Journal of the Optical Society of America A
DOI:
10.1364/JOSAA.34.002243
Date:
December, 2017
File:
PDF, 2.57 MB
english, 2017